In-line Ionization Kit for SRDs

Simco-Ion In-Line Gas Ionizer: Static Control in Spin Rinser Dryers (SRDs)

The characteristics of the spin rinsing and drying processes make them responsible for many problems associated with static charge. In the turbulent environment of an SRD chamber, highly insulative deionized water shears across silicon and Teflon™ surfaces, creating high levels of static charge.

Driving water from these surfaces and drying them with hot nitrogen creates even higher static levels. Since static charge is known to attract and bond particles to wafer surfaces, high static levels in the SRD lowers the SRD’s efficiency in removing particles.

Once the charged wafers and cassettes leave the SRD, they continue to attract contaminating particles from the cleanroom ambient. In today’s high technology industries, even a single additional particle-related defect is unacceptable.